Laser-fabricated ball lens optical interface for back side coupling to a silicon photonics sensor chip

dc.contributor.author	Missinne, Jeroen
dc.contributor.author	Geudens, Viktor
dc.contributor.author	Mattelin, Marie
dc.contributor.author	Poulopoulos, Giannis
dc.contributor.author	Zervos, Charalampos
dc.contributor.author	Avramopoulos, Hercules
dc.contributor.author	Szaj, Michal
dc.contributor.author	Van Steenberge, Geert
dc.contributor.imecauthor	Missinne, Jeroen
dc.contributor.imecauthor	Geudens, Viktor
dc.contributor.imecauthor	Mattelin, Marie
dc.contributor.imecauthor	Van Steenberge, Geert
dc.contributor.orcidimec	Missinne, Jeroen::0000-0002-3470-620X
dc.contributor.orcidimec	Van Steenberge, Geert::0000-0001-8574-1235
dc.date.accessioned	2023-01-19T16:05:19Z
dc.date.available	2022-11-07T02:55:19Z
dc.date.available	2023-01-19T16:05:19Z
dc.date.issued	2021
dc.identifier.doi	10.1109/IPC48725.2021.9592972
dc.identifier.eisbn	978-1-6654-1601-6
dc.identifier.issn	2374-0140
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40694
dc.publisher	IEEE
dc.source.conference	Annual Conference of the IEEE-Photonics-Society (IPC)
dc.source.conferencedate	OCT 18-21, 2021
dc.source.conferencelocation	Vancouver
dc.source.journal	na
dc.source.numberofpages	2
dc.title	Laser-fabricated ball lens optical interface for back side coupling to a silicon photonics sensor chip
dc.type	Proceedings paper
dspace.entity.type	Publication
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