Publication:

Ni(Pt)Si thermal stability improvement by carbon implantation

Date

2008
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorMertens, Sofie
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorVrancken, Christa
dc.contributor.authorJakschik, S.
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorAbsil, Philippe
dc.contributor.authorLauwers, Anne
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorLauwers, Anne
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-17T09:02:01Z
dc.date.available2021-10-17T09:02:01Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14165
dc.source.beginpage675
dc.source.conference213th ECS Meeting
dc.source.conferencedate18/05/2008
dc.source.conferencelocationPhoenix, AZ USA
dc.title

Ni(Pt)Si thermal stability improvement by carbon implantation

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
16947.pdf
Size:
141.1 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions