Publication:

Gray assist bar OPC

Date

2004-10
Proceedings Paper
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dc.contributor.authorLafferty, Neal
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorSmith, B.W.
dc.contributor.authorLassiter, Matthew
dc.contributor.authorMartin, Patrick M.
dc.contributor.imecauthorVandenberghe, Geert
dc.date.accessioned2021-10-15T14:17:14Z
dc.date.available2021-10-15T14:17:14Z
dc.date.embargo9999-12-31
dc.date.issued2004-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9156
dc.source.beginpage381
dc.source.conferenceOptical Microlithography XVII
dc.source.conferencedate22/02/2004
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage392
dc.title

Gray assist bar OPC

dc.typeProceedings paper
dspace.entity.typePublication
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