Capping-metal gate integration technology for multiple-VT CMOS in MuGFETs

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Author(s)

Veloso, Anabela

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Witters, Liesbeth

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Ferain, Isabelle

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Roussel, Philippe

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Adelmann, Christoph

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Richard, Olivier

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Conard, Thierry

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Rooyackers, Rita

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Van Elshocht, Sven

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Collaert, Nadine

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De Meyer, Kristin

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Biesemans, Serge

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Jurczak, Malgorzata

Metrics

1960 since deposited on 2021-10-17

Acq. date: 2025-10-23