Publication:

Understanding defects in CHIPS flow hexagonal arrays and strategies for improvement

Date

2016
Proceedings Paper
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dc.contributor.authorSingh, Arjun
dc.contributor.authorLee, Jongsu
dc.contributor.authorNam, Jaewoo
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-23T15:00:59Z
dc.date.available2021-10-23T15:00:59Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27324
dc.identifier.urlhttp://www.dsasymposium.org/index.php/program/dsa-proceedings
dc.source.conferenceDSA Symposium
dc.source.conferencedate11/10/2016
dc.source.conferencelocationGrenoble France
dc.title

Understanding defects in CHIPS flow hexagonal arrays and strategies for improvement

dc.typeProceedings paper
dspace.entity.typePublication
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