Process-induced V-t variability in nanoscale FinFETs: Does V-t extraction methods have any impact?

dc.contributor.author	Bhoir, Mandar S.
dc.contributor.author	Chiarella, Thomas
dc.contributor.author	Ragnarsson, Lars A.
dc.contributor.author	Mitard, Jerome
dc.contributor.author	Horiguchi, Naoto
dc.contributor.author	Mohapatra, Nihar R.
dc.contributor.imecauthor	Chiarella, Thomas
dc.contributor.imecauthor	Ragnarsson, Lars A.
dc.contributor.imecauthor	Mitard, Jerome
dc.contributor.imecauthor	Horiguchi, Naoto
dc.contributor.orcidimec	Chiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimec	Mitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimec	Horiguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned	2022-01-20T10:18:22Z
dc.date.available	2021-11-02T16:05:56Z
dc.date.available	2022-01-20T10:18:22Z
dc.date.issued	2020
dc.identifier.eisbn	978-1-7281-2539-8
dc.identifier.issn	na
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/38240
dc.publisher	IEEE
dc.source.conference	IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
dc.source.conferencedate	MAR 16-18, 2020
dc.source.conferencelocation	Penang, Malaysia
dc.source.journal	na
dc.source.numberofpages	4
dc.title	Process-induced V-t variability in nanoscale FinFETs: Does V-t extraction methods have any impact?
dc.type	Proceedings paper
dspace.entity.type	Publication
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Publication available in collections:	Conference contributions