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Investigation of correlations between parameters defining the state of sputtered particles

Date

1998
Proceedings Paper
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dc.contributor.authorVlekken, J.
dc.contributor.authorCroes, Kris
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorKnuyt, G.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Schepper, Luc
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-01T09:40:47Z
dc.date.available2021-10-01T09:40:47Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3130
dc.source.beginpage931
dc.source.conferenceSIMS XI - Secondary Ion Mass Spectrometry
dc.source.conferencedate8/09/1997
dc.source.conferencelocationOrlando, FL USA
dc.source.endpage934
dc.title

Investigation of correlations between parameters defining the state of sputtered particles

dc.typeProceedings paper
dspace.entity.typePublication
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