Publication:

Cobalt bottom-up contact and via prefill enabling advanced logic and DRAM technologies

Date

2015

Proceedings Paper

Simple item page Full metadata Statistics

Files

31700.pdf 1.42 MB

Author(s)

van der Veen, Marleen

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Vandersmissen, Kevin

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Demuynck, Steven

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Lesniewska, Alicja

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Boemmels, Juergen

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Statistics

2015 since deposited on 2021-10-23

Acq. date: 2026-09-12