Enhancing the defect contrast in ECCI through angular filtering of BSEs

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Author(s)

;

Hantschel, Thomas

;

Schulze, Andreas

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;

Vystavel, Tomas

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;

Kunert, Bernardette

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;

Vandervorst, Wilfried

;

Journal

Ultramicroscopy

Metrics

1991 since deposited on 2021-10-28

Acq. date: 2025-10-26