Publication:
Ni Oxidation study for 3D Interconnect Application
Date
| dc.contributor.author | Kim, Tae-Gon | |
| dc.contributor.author | Guerrieri, Stefano | |
| dc.date.accessioned | 2021-10-21T08:52:21Z | |
| dc.date.available | 2021-10-21T08:52:21Z | |
| dc.date.issued | 2013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22603 | |
| dc.source.conference | The 6th International Conference on Spectroscopic Ellipsometry (ICSE-VI) | |
| dc.source.conferencedate | 26/05/2013 | |
| dc.source.conferencelocation | Kyoto Japan | |
| dc.title | Ni Oxidation study for 3D Interconnect Application | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |