Publication:

CMOS technology development vehicle for bulk FinFET N10/N7

Date

2013
Presentation
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dc.contributor.authorDehan, Morin
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorVan der Plas, Geert
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.date.accessioned2021-10-21T07:15:16Z
dc.date.available2021-10-21T07:15:16Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22243
dc.source.conference9th International Nanotechnology Conference on Communication and Cooperation - INC9
dc.source.conferencedate15/05/2013
dc.source.conferencelocationBerlijn Germany
dc.title

CMOS technology development vehicle for bulk FinFET N10/N7

dc.typeOral presentation
dspace.entity.typePublication
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