Publication:
Modeling for profile-based process window metrology
Date
| dc.contributor.author | Ausschnitt, C.P. | |
| dc.contributor.author | Cheng, Shaunee | |
| dc.date.accessioned | 2021-10-15T12:39:33Z | |
| dc.date.available | 2021-10-15T12:39:33Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8501 | |
| dc.source.beginpage | 38 | |
| dc.source.conference | Data Analysis and Modeling for Process Control | |
| dc.source.conferencedate | 22/02/2004 | |
| dc.source.conferencelocation | Santa Clara, CA USA | |
| dc.source.endpage | 47 | |
| dc.title | Modeling for profile-based process window metrology | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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