Publication:
High-k metal gate MOSFETs: Impact of extrinsic process condition on the gate-stack quality. A mobility study
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1890 since deposited on 2021-10-16
Acq. date: 2025-10-23
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Metrics
Views
1890 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations