Publication:
A study of the planarization process during chemical mechanical polishing for oxides and shallow trench isolation
Date
| dc.contributor.author | Grillaert, Joost | |
| dc.date.accessioned | 2021-10-06T11:13:26Z | |
| dc.date.available | 2021-10-06T11:13:26Z | |
| dc.date.issued | 1999-05 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3471 | |
| dc.title | A study of the planarization process during chemical mechanical polishing for oxides and shallow trench isolation | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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