Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Simultaneous Cu-Cu and compliant dielectric bonding for 3D stacking of ICs
Publication:
Simultaneous Cu-Cu and compliant dielectric bonding for 3D stacking of ICs
Copy permalink
Date
2007-06
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Jourdain, Anne
;
Stoukatch, Serguei
;
De Moor, Piet
;
Ruythooren, Wouter
;
Pargfrieder, S.
;
Swinnen, Bart
;
Beyne, Eric
Journal
Abstract
Description
Metrics
Views
1861
since deposited on 2021-10-16
4
last month
1
last week
Acq. date: 2026-01-06
Citations
Metrics
Views
1861
since deposited on 2021-10-16
4
last month
1
last week
Acq. date: 2026-01-06
Citations