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Surface-charge lithography for the fabrication of gallium nitride based gas sensors

Date

2009
Meeting abstract
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dc.contributor.authorSchuller, Tim
dc.contributor.authorHeard, Peter
dc.contributor.authorPopa, Veaceslav
dc.contributor.authorVolciuc, Olesea
dc.contributor.authorTiginyanu, Ion
dc.contributor.authorDas, Jo
dc.contributor.authorDegroote, Stefan
dc.contributor.authorGermain, Marianne
dc.contributor.authorSarua, Andrei
dc.contributor.authorKuball, Martin
dc.date.accessioned2021-10-18T02:46:34Z
dc.date.available2021-10-18T02:46:34Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16183
dc.source.beginpageI6.7
dc.source.conferenceMRS Fall Meeting Symposium I: III-Nitride Materials for Sensing, Energy Conversion, and Controlled Light-Matter Interactions
dc.source.conferencedate30/11/2009
dc.source.conferencelocationBoston, MA USA
dc.title

Surface-charge lithography for the fabrication of gallium nitride based gas sensors

dc.typeMeeting abstract
dspace.entity.typePublication
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