Determining the oxygen detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)

dc.contributor.author	Merkulov, Alex
dc.contributor.imecauthor	Merkulov, Alex
dc.contributor.orcidimec	Merkulov, Alex::0000-0003-4101-0873
dc.date.accessioned	2024-04-08T11:40:14Z
dc.date.available	2023-07-30T17:28:51Z
dc.date.available	2024-04-08T11:40:14Z
dc.date.issued	2023
dc.identifier.doi	10.1116/6.0002578
dc.identifier.issn	2166-2746
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/42246
dc.publisher	A V S AMER INST PHYSICS
dc.source.beginpage	Art. 044009
dc.source.endpage	N/A
dc.source.issue	4
dc.source.journal	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
dc.source.numberofpages	6
dc.source.volume	41
dc.subject.keywords	CARBON
dc.title	Determining the oxygen detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)
dc.type	Journal article
dspace.entity.type	Publication
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