Multi-trigger resist patterning with ASML NXE3300 EUV scanner

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Author(s)

Vesters, Yannick

;

McClelland, Alexandra

;

De Simone, Danilo

;

Popescu, Carmen

;

;

;

Theis, Wolfgang

;

Vandenberghe, Geert

;

Robinson, Alex P. G.

Metrics

2015 since deposited on 2021-10-26

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Acq. date: 2025-10-24