Publication:

Multi-trigger resist patterning with ASML NXE3300 EUV scanner

Date

2018

Proceedings Paper

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Files

37567.pdf 4.91 MB

Author(s)

Vesters, Yannick

;

McClelland, Alexandra

;

De Simone, Danilo

;

Popescu, Carmen

;

;

;

Theis, Wolfgang

;

Vandenberghe, Geert

;

Robinson, Alex P. G.

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