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Conference contributions
Characterization of patterned porous dielectrics after plasma patterning and subsequent wet processing
Publication:
Characterization of patterned porous dielectrics after plasma patterning and subsequent wet processing
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Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Le, Quoc Toan
;
Kesters, Els
;
Decoster, Stefan
;
Chan, BT
;
Holsteyns, Frank
;
De Gendt, Stefan
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Abstract
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1900
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations
Metrics
Views
1900
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations