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Finite size effects in highly scaled ruthenium interconnects
Publication:
Finite size effects in highly scaled ruthenium interconnects
Date
2018
Journal article
https://doi.org/10.1109/LED.2017.2788889
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dutta, Shibesh
;
Moors, Kristof
;
Vandemaele, Michiel
;
Adelmann, Christoph
Journal
IEEE Electron Device Letters
Abstract
Description
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1959
since deposited on 2021-10-25
420
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Acq. date: 2025-10-25
Citations
Metrics
Views
1959
since deposited on 2021-10-25
420
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations