Publication:
New technique localizes defects in 3D chips
Date
| dc.contributor.author | Jacobs, Kristof J.P. | |
| dc.contributor.author | Parton, Els | |
| dc.contributor.imecauthor | Jacobs, Kristof J.P. | |
| dc.contributor.imecauthor | Parton, Els | |
| dc.contributor.orcidimec | Jacobs, Kristof J.P.::0000-0002-1081-3633 | |
| dc.date.accessioned | 2021-10-24T06:12:03Z | |
| dc.date.available | 2021-10-24T06:12:03Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28578 | |
| dc.source.journal | IMEC magazine | |
| dc.title | New technique localizes defects in 3D chips | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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