Publication:

Tool-to-tool optical proximity effect matching

Date

2008
Proceedings Paper
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dc.contributor.authorVan Look, Lieve
dc.contributor.authorBekaert, Joost
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorVan de Kerkhove, Jeroen
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorSchreel, Koen
dc.contributor.authorMenger, Jasper
dc.contributor.authorSchiffelers, Guido
dc.contributor.authorKnols, Edwin
dc.contributor.authorWillekers, Rob
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorVan de Kerkhove, Jeroen
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorSchiffelers, Guido
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.accessioned2021-10-17T11:57:51Z
dc.date.available2021-10-17T11:57:51Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14667
dc.source.beginpage69241Q
dc.source.conferenceOptical Microlithography XXI
dc.source.conferencedate24/02/2008
dc.source.conferencelocationSan Jose, CA USA
dc.title

Tool-to-tool optical proximity effect matching

dc.typeProceedings paper
dspace.entity.typePublication
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