Publication:

Charge retention in a patterned SiO2/Si3N4 electret

Date

2013
Journal article
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dc.contributor.authorLeonov, Vladimir
dc.contributor.authorvan Schaijk, Rob
dc.contributor.authorVan Hoof, Chris
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.date.accessioned2021-10-21T09:13:51Z
dc.date.available2021-10-21T09:13:51Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.issn1530-437X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22668
dc.source.beginpage3369
dc.source.endpage3376
dc.source.issue9
dc.source.journalIEEE Sensors Journal
dc.source.volume13
dc.title

Charge retention in a patterned SiO2/Si3N4 electret

dc.typeJournal article
dspace.entity.typePublication
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