Publication:
Two- and three dimensional carrier/dopant profiling with (sub) nm resolution
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T21:03:53Z | |
| dc.date.available | 2021-10-16T21:03:53Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13122 | |
| dc.source.conference | GADEST Conference: Gettering and Defect Engineering in Semiconductor Technology | |
| dc.source.conferencedate | 14/10/2007 | |
| dc.source.conferencelocation | Erice Italy | |
| dc.title | Two- and three dimensional carrier/dopant profiling with (sub) nm resolution | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
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