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Conference contributions
Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors
Publication:
Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors
Date
2013
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hikavyy, Andriy
;
Kubicek, Stefan
;
Chew, Soon Aik
;
Boccardi, Guillaume
;
Favia, Paola
;
Eneman, Geert
;
Loo, Roger
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Abstract
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1953
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations
Metrics
Views
1953
since deposited on 2021-10-21
Acq. date: 2025-10-23
Citations