Publication:
Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1958 since deposited on 2021-10-21
1last month
Acq. date: 2026-02-27
Citations
Statistics
Views
1958 since deposited on 2021-10-21
1last month
Acq. date: 2026-02-27
Citations