Publication:
Spreading resistance roadmap towards and beyond the 70 nm technology node
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.date.accessioned | 2021-10-14T23:44:44Z | |
| dc.date.available | 2021-10-14T23:44:44Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6983 | |
| dc.source.beginpage | 451 | |
| dc.source.endpage | 458 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Vacuum Science & Technology B | |
| dc.source.volume | 20 | |
| dc.title | Spreading resistance roadmap towards and beyond the 70 nm technology node | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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