Publication:
RF-MEMS: materials and technology, integration and packaging
Date
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-15T06:58:21Z | |
| dc.date.available | 2021-10-15T06:58:21Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8214 | |
| dc.source.beginpage | B6.6 | |
| dc.source.conference | Materials, Integration and Packaging Issues for High-Frequency Devices | |
| dc.source.conferencedate | 1/12/2003 | |
| dc.source.conferencelocation | Boston, MA USA | |
| dc.title | RF-MEMS: materials and technology, integration and packaging | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |