Publication:

Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations

Date

2018

Proceedings Paper

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Files

38712.pdf 1.92 MB

Author(s)

;

;

Van Beek, Simon

;

Linten, Dimitri

Statistics

1981 since deposited on 2021-10-25

2last month

Acq. date: 2026-08-24