Nucleation kinetics of electroless Cu deposition on ruthenium using glyoxylic acid as reducing agent

dc.contributor.author	Inoue, Fumihiro
dc.contributor.author	Philipsen, Harold
dc.contributor.author	van der Veen, Marleen
dc.contributor.author	Van Huylenbroeck, Stefaan
dc.contributor.author	Armini, Silvia
dc.contributor.author	Struyf, Herbert
dc.contributor.author	Tanaka, Tetsu
dc.contributor.imecauthor	Inoue, Fumihiro
dc.contributor.imecauthor	Philipsen, Harold
dc.contributor.imecauthor	van der Veen, Marleen
dc.contributor.imecauthor	Van Huylenbroeck, Stefaan
dc.contributor.imecauthor	Armini, Silvia
dc.contributor.imecauthor	Struyf, Herbert
dc.contributor.orcidimec	Philipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimec	van der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimec	Van Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimec	Armini, Silvia::0000-0003-0578-3422
dc.date.accessioned	2021-10-22T02:13:08Z
dc.date.available	2021-10-22T02:13:08Z
dc.date.issued	2014
dc.identifier.issn	0013-4651
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/23983
dc.identifier.url	http://dx.doi.org/10.1149/2.0361414jes
dc.source.beginpage	D768
dc.source.endpage	D774
dc.source.issue	14
dc.source.journal	Journal of the Electrochemical Society
dc.source.volume	161
dc.title	Nucleation kinetics of electroless Cu deposition on ruthenium using glyoxylic acid as reducing agent
dc.type	Journal article
dspace.entity.type	Publication
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