Publication:
A new method to determine the mechanical resonance frequency and charging in electrostatically actuated MEMS
Date
| dc.contributor.author | Kalicinski, Stanislaw | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.author | Wevers, Martine | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-16T17:02:00Z | |
| dc.date.available | 2021-10-16T17:02:00Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12381 | |
| dc.source.beginpage | 329 | |
| dc.source.conference | 18th Workshop on Micromachining, Micromechanics and Microsystems | |
| dc.source.conferencedate | 16/09/2007 | |
| dc.source.conferencelocation | Guimaraes Portugal | |
| dc.source.endpage | 332 | |
| dc.title | A new method to determine the mechanical resonance frequency and charging in electrostatically actuated MEMS | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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