Publication:

Multi-layer graphene interconnect - a feasibility study

Date

2016
Proceedings Paper
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dc.contributor.authorPolitou, Maria
dc.contributor.authorWu, Xiangyu
dc.contributor.authorContino, Antonino
dc.contributor.authorSoree, Bart
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorLin, Dennis
dc.contributor.authorRadu, Iuliana
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAsselberghs, Inge
dc.contributor.imecauthorWu, Xiangyu
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorSoree, Bart
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.orcidimecSoree, Bart::0000-0002-4157-1956
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.accessioned2021-10-23T13:48:07Z
dc.date.available2021-10-23T13:48:07Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27156
dc.source.beginpage200
dc.source.conferenceIEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC
dc.source.conferencedate23/05/2016
dc.source.conferencelocationSan Jose, CA USA
dc.source.endpage202
dc.title

Multi-layer graphene interconnect - a feasibility study

dc.typeProceedings paper
dspace.entity.typePublication
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