Publication:

Epitaxial growth challenges for advanced CMOS devices

Date

2013

Proceedings Paper

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Files

26236.pdf 254.84 KB

Author(s)

;

Hikavyy, Andriy

;

Vincent, Benjamin

;

Witters, Liesbeth

;

;

;

Rooyackers, Rita

;

Vandooren, Anne

;

Vandervorst, Wilfried

;

Metrics

1808 since deposited on 2021-10-21

Acq. date: 2025-12-15