Publication:

On the processing aspects of high performance hybrid backside

Date

2011
Journal article
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dc.contributor.authorDe Vos, Joeri
dc.contributor.authorDe Munck, Koen
dc.contributor.authorMinoglou, Kiki
dc.contributor.authorRamachandra Rao, Padmakumar
dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorDe Moor, Piet
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorDe Munck, Koen
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.date.accessioned2021-10-19T13:09:07Z
dc.date.available2021-10-19T13:09:07Z
dc.date.issued2011
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18807
dc.identifier.urlhttp://stacks.iop.org/0960-1317/21/074006
dc.source.beginpage74006
dc.source.issue7
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.volume21
dc.title

On the processing aspects of high performance hybrid backside

dc.typeJournal article
dspace.entity.typePublication
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