Publication:
Diffractive optical element applied to proximity exposure lithography exploring partial light coherence
Date
| dc.contributor.author | Verdonck, Patrick | |
| dc.contributor.author | Cirino, Giuseppe | |
| dc.contributor.author | Mansano, Ronaldo | |
| dc.contributor.author | Goncalves Neto, Luiz | |
| dc.contributor.imecauthor | Verdonck, Patrick | |
| dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
| dc.date.accessioned | 2021-10-18T23:41:42Z | |
| dc.date.available | 2021-10-18T23:41:42Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18261 | |
| dc.source.conference | Latin America Optics and Photonics Conference - LAOP | |
| dc.source.conferencedate | 27/09/2010 | |
| dc.source.conferencelocation | Recife Brazil | |
| dc.title | Diffractive optical element applied to proximity exposure lithography exploring partial light coherence | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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