Publication:
Ion-implanted resist stripping with water vapour
Date
| dc.contributor.author | Daviet, Jean-François | |
| dc.contributor.author | Coosemans, Frank | |
| dc.contributor.author | Vertommen, Johan | |
| dc.date.accessioned | 2021-09-29T12:40:22Z | |
| dc.date.available | 2021-09-29T12:40:22Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/96 | |
| dc.source.beginpage | 21 | |
| dc.source.endpage | 23 | |
| dc.source.issue | April | |
| dc.source.journal | European Semiconductor | |
| dc.source.volume | 16 | |
| dc.title | Ion-implanted resist stripping with water vapour | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |