Publication:

Interface chemistry of Al2O3/III-V upon atomic layer deposition

Date

2012
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Author(s)

Tallarida, Massimo
;
Adelmann, Christoph  
;
Cuypers, Daniel
;
Rodriguez, Leonard
;
Lin, Dennis  
;
Michling, Marcel
;
Friedrich, Daniel
;
De Clercq, Astrid
;
Delabie, Annelies  
;
Van Elshocht, Sven  
;
Locquet, Jean-Pierre
;
Caymax, Matty  
;
Schmeisser, Dieter

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Abstract

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1905 since deposited on 2021-10-20
Acq. date: 2025-12-09

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1905 since deposited on 2021-10-20
Acq. date: 2025-12-09

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