Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Application of plasma etch processes to gallium arsenide technology
Publication:
Application of plasma etch processes to gallium arsenide technology
Copy permalink
Date
2009
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
19268.pdf
336.7 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tutunjyan, Nina
;
Sakharova, Tania
;
Kalandadze, Givi
;
Pavliashvili, Tamaz
;
Khuchua, Nina
Journal
Abstract
Description
Metrics
Views
1846
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1846
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-15
Citations