Publication:
Damage layer in silica-based low-k material induced by the patterning plasma process studied by energy-filtered TEM
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1881 since deposited on 2021-10-16
2last month
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Acq. date: 2025-12-15
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1881 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2025-12-15
Citations