Publication:

High resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy

Date

1999
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorChen, Jian
dc.contributor.authorRasras, Mahmoud
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorSimons, Veerle
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorSimons, Veerle
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.date.accessioned2021-10-06T10:59:41Z
dc.date.available2021-10-06T10:59:41Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3388
dc.source.beginpage239
dc.source.conferenceAdvanced Photonic Sensors and Applications
dc.source.conferencedate30/11/1999
dc.source.conferencelocationSingapore
dc.source.endpage252
dc.title

High resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
3350.pdf
Size:
1.05 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions