Publication:
Evaluation of trap creation and charging in thin SiO2 using both SCM and C-AFM
Date
| dc.contributor.author | Polspoel, Wouter | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T18:44:41Z | |
| dc.date.available | 2021-10-16T18:44:41Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12726 | |
| dc.source.beginpage | 495 | |
| dc.source.endpage | 500 | |
| dc.source.issue | 3 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 84 | |
| dc.title | Evaluation of trap creation and charging in thin SiO2 using both SCM and C-AFM | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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