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Design of a miniaturized accelerometer with 200 nm capacitive sensing gap

Date

2011
Meeting abstract
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dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorSeveri, Simone
dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorFrancis, Laurent
dc.contributor.authorWitvrouw, Ann
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorSeveri, Simone
dc.date.accessioned2021-10-19T18:00:12Z
dc.date.available2021-10-19T18:00:12Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19670
dc.source.conferenceICT.OPEN
dc.source.conferencedate14/11/2011
dc.source.conferencelocationVeldhoven Nederland
dc.title

Design of a miniaturized accelerometer with 200 nm capacitive sensing gap

dc.typeMeeting abstract
dspace.entity.typePublication
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