Publication:

Photonic crystal waveguides in SOI fabricated with deep UV lithography

Date

2002
Proceedings Paper
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dc.contributor.authorBogaerts, Wim
dc.contributor.authorWiaux, Vincent
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorBeckx, Stephan
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-14T21:10:29Z
dc.date.available2021-10-14T21:10:29Z
dc.date.embargo9999-12-31
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6045
dc.source.beginpage4.4.5 (vol.2)
dc.source.conference28th European Conference on Optical Communication - ECOC
dc.source.conferencedate8/09/2002
dc.source.conferencelocationCopenhagen Denmark
dc.title

Photonic crystal waveguides in SOI fabricated with deep UV lithography

dc.typeProceedings paper
dspace.entity.typePublication
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