Publication:
Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
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355 since deposited on 2024-10-30
5last month
Acq. date: 2026-09-14
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Statistics
Views
355 since deposited on 2024-10-30
5last month
Acq. date: 2026-09-14
Citations