Publication:
Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
Loading...
Journal
Abstract
Description
Metrics
Views
327 since deposited on 2024-10-30
Acq. date: 2025-10-25
Citations
Metrics
Views
327 since deposited on 2024-10-30
Acq. date: 2025-10-25
Citations