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Replacing SiO2 - Material and processing aspects of new dielectrics
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Replacing SiO2 - Material and processing aspects of new dielectrics
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Date
2008
Proceedings Paper
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16294.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Gendt, Stefan
;
Adelmann, Christoph
;
Delabie, Annelies
;
Nyns, Laura
;
Pourtois, Geoffrey
;
Van Elshocht, Sven
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1811
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
Metrics
Views
1811
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations