Publication:
Mechanism of photochemical reactions and photophysical processes during UV curing of organosilicate films with low dielectric constant
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-18T15:17:41Z | |
| dc.date.available | 2021-10-18T15:17:41Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16699 | |
| dc.source.conference | International Conference on Modern Problems in the Physics of Surfaces and Nanostructures | |
| dc.source.conferencedate | 8/06/2010 | |
| dc.source.conferencelocation | Yaroslavl Russia | |
| dc.title | Mechanism of photochemical reactions and photophysical processes during UV curing of organosilicate films with low dielectric constant | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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