Publication:

An improved technology for elevated source/drain MOSFETS

Date

1997
Proceedings Paper
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dc.contributor.authorWaite, Andrew Michael
dc.contributor.authorHoward, Dave
dc.contributor.authorKubicek, Stefan
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorEvans, A. G. R.
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Meyer, Kristin
dc.date.accessioned2021-09-30T10:06:09Z
dc.date.available2021-09-30T10:06:09Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2302
dc.source.beginpage256
dc.source.conferenceESSDERC '97: Proceedings of the 27th European Solid-State Device Research Conference
dc.source.conferencedate22/09/1997
dc.source.conferencelocationStuttgart Germany
dc.source.endpage258
dc.title

An improved technology for elevated source/drain MOSFETS

dc.typeProceedings paper
dspace.entity.typePublication
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