Publication:

Selective Ge removal from SiGe surface for Si-cap-free SiGe passivation

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1923 since deposited on 2021-10-29
26last month
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Acq. date: 2026-10-13

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1923 since deposited on 2021-10-29
26last month
6last week
Acq. date: 2026-10-13

Citations