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Selective Ge removal from SiGe surface for Si-cap-free SiGe passivation
Publication:
Selective Ge removal from SiGe surface for Si-cap-free SiGe passivation
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Date
2020
Meeting abstract
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44675.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wostyn, Kurt
;
Arimura, Hiroaki
;
Hikavyy, Andriy
;
Rondas, Dirk
;
Vaisman Chasin, Adrian
;
Conard, Thierry
;
Ragnarsson, Lars-Ake
;
Horiguchi, Naoto
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1873
since deposited on 2021-10-29
1
last month
Acq. date: 2025-12-15
Citations