Publication:

Towards Robust Defect Inspection in Advanced Node Semiconductors via Continual Learning

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3052286
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dc.contributor.authorDey, Bappaditya
dc.contributor.authorPrasad, Amit
dc.contributor.authorBelgharat, Aya
dc.contributor.authorBlanco, Victor
dc.contributor.authorHalder, Sandip
dc.contributor.imecauthorDey, Bappaditya
dc.contributor.imecauthorPrasad, Amit
dc.contributor.imecauthorBelgharat, Aya
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorHalder, Sandip
dc.contributor.orcidimecDey, Bappaditya::0000-0002-0886-137X
dc.contributor.orcidimecBlanco, Victor::0000-0003-4308-0381
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2025-07-28T03:57:59Z
dc.date.available2025-07-28T03:57:59Z
dc.date.issued2025
dc.identifier.doi10.1117/12.3052286
dc.identifier.eisbn978-1-5106-8639-7
dc.identifier.isbn978-1-5106-8638-0
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45965
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage134263J-1
dc.source.conference2025 Conference on Metrology Inspection and Process Control-Annual
dc.source.conferencedate2024-02-28
dc.source.conferencelocationSan Jose
dc.source.endpage134263J-14
dc.source.journalProceedings of SPIE
dc.source.numberofpages14
dc.title

Towards Robust Defect Inspection in Advanced Node Semiconductors via Continual Learning

dc.typeProceedings paper
dspace.entity.typePublication
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