Publication:
Challenges for chemical processing of high aspect ratio nanostructures
Date
| dc.contributor.author | Vereecke, Guy | |
| dc.contributor.imecauthor | Vereecke, Guy | |
| dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
| dc.date.accessioned | 2021-10-26T08:23:26Z | |
| dc.date.available | 2021-10-26T08:23:26Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32183 | |
| dc.source.conference | SEMICON Korea - S5. Contamination-free Manufacturing and CMP Technology | |
| dc.source.conferencedate | 31/01/2018 | |
| dc.source.conferencelocation | Seoul South Korea | |
| dc.title | Challenges for chemical processing of high aspect ratio nanostructures | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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