Publication:
Silicon material challenges for (sub) 100 nm technologies
Date
| dc.contributor.author | Claeys, Cor | |
| dc.date.accessioned | 2021-10-14T12:44:05Z | |
| dc.date.available | 2021-10-14T12:44:05Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4192 | |
| dc.source.conference | 10th Wacker Symposium | |
| dc.source.conferencedate | 3/11/2000 | |
| dc.source.conferencelocation | Burghausen Germany | |
| dc.title | Silicon material challenges for (sub) 100 nm technologies | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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